Mapping of ion beam induced current changes in FinFETs
نویسندگان
چکیده
منابع مشابه
Ion Beam Induced Current Measurements of Solar Cells with Helium Ion Microscopy
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2009
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.019